Design of 2 MHz/80 kW RF power coupling system for ion source
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摘要: 介绍了一种用于大科学工程装置中国散裂中子源(CSNS) 功率升级的RF负氢离子源大功率射频功率耦合系统的研制。主要内容包括射频功率耦合系统的构造, 指标计算分配以及具体实现, 重点阐述了射频功率放大器、隔离变压器、阻抗变压调谐器以及配套的电源、控制和冷却系统的设计, 并对整个系统的结构和热设计提出了工程解决方法。针对离子源功率耦合系统的特点作了细致的分析, 并以此为基础, 研制出了一款输出功率达80kW的射频功率耦合系统产品。Abstract: This paper introduces a high RF power coupling system for ion source application to national large-scale scientific facility CSNS, including the system architecture, RF system metrics calculating, assigning and implementing.This paper focuses on the designs of RF power amplifier, isolation transformer, impedance converter, auxiliary power supply, control & monitor and cooling system.It also discusses the structure and thermal designs in detail and gives the development results of a 80 kW RF power at the least at last based on careful analysis of the characteristic of the RF power coupling system.
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图 1 射频功率耦合系统组成框图
Figure 1. System composition block diagram of RF power coupling system
表 1 主要技术指标要求
Table 1. Requirements of system
parameter value remarks frequency 1.9~2.1 MHz repetition rate 25 Hz pulse length 1.1 ms maximum load impedance 0.1~1.3 Ω resistance@matching 25 Ω inductive or capacitive reactance@mismatching RF input power ≤7 dBm RF output power 80 kW 2.75% duty factor system response 3 μs mismatch tolerance will operate without damage power drift in 48 h < 2% pulse drop < 10% 
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