High-performance multifunctional apparatus for studying secondary electron emission characteristics of dielectric
-
摘要: 介绍了一套高性能多功能介质二次电子发射特性研究平台和介质材料二次电子产额脉冲测量方法。该平台配备有三层栅网结构的收集器和30 eV～30 keV宽能量范围的电子枪，可在10−8 Pa超高真空下测量介质材料的二次电子发射特性，并具备XPS能谱分析、加热和氩离子溅射清洗原位处理分析功能。给出了测得的金和氧化铝材料的二次电子电流脉冲，通过判断电流脉冲波形随时间以及照射次数的变化，获得了介质材料带电饱和时间及材料厚度对带电量的影响。Abstract: The paper introduces a high-performance multifunctional apparatus for studying secondary electron emission characteristics of dielectric. The apparatus is equipped with a collector containing three grids and a 30 eV−30 keV electron gun, the secondary electron emission characteristics of dielectric can be measured under ultra-high vacuum, and in-situ XPS analysis spectrometer, heating and argon ion sputtering can also be performed. The paper also introduces the measurement of secondary electron yield by pulse method, gives the measured secondary electron current pulse of gold and Al2O3, presents the charging saturation time and influence of the thickness of dielectric on the charge amount obtained by judging the change of the current pulse waveform with time and the number of irradiations.
-
图 3 二次电子电流脉冲测试示意图
Figure 3. Schematic diagram of measuring the pulse of secondary electrons
图 5 不同脉冲电子束照射下的氧化铝样品二次电子电流脉冲
Figure 5. Measured pulses of secondary electron current of Al2O3 sample
-
[1] 承欢, 江剑平. 阴极电子学[M]. 西安: 西北电讯工程学院出版社, 1986: 164.Cheng Huan, Jiang Jianping. Cathode electronics[M]. Xi’an: Publishing House of Northwest Telecommunication Engineering Institute, 1986:164 [2] Fukunaga K, Okamotok M T. Space charge observation in aramid/epoxy insulations under DC electric field[J]. IEEE Transaction on Components and Packing Technologies, 2006, 29(3): 502-507. doi: 10.1109/TCAPT.2005.853173 [3] 李盛涛, 李国倡, 闵道敏, 等. 入射电子能量对低密度聚乙烯深层充电特性的影响[J]. 物理学报, 2013, 62:059401. (Li Shengtao, Li Guochang, Min Daomin, et al. Influence of radiation electron energy on deep dielectric charging characteristics of low density polyethylene[J]. Acta Physica Sinica, 2013, 62: 059401 doi: 10.7498/aps.62.059401 [4] Torregrosa G, Coves A, Vicente C, et al. Time evolution of an electron discharge in a parallel-plate dielectric-loaded waveguide[J]. IEEE Electron Device Letters, 2006, 27(7): 619-621. doi: 10.1109/LED.2006.877284 [5] Li Yun, Wang Dan, Yu Ming, et al. Experimental verification of multipactor discharge dynamics between ferrite dielectric and metal[J]. IEEE Transactions on Electron Devices, 2018, 65(10): 4592-4599. doi: 10.1109/TED.2018.2865164 [6] Torregrosa-Penalva G, Coves Á, Martinez B, et al. Multipactor susceptibility charts of a parallel-plate dielectric-loaded waveguide[J]. IEEE Transaction on Electron Devices, 2010, 57(5): 1160-1166. doi: 10.1109/TED.2010.2043182 [7] Coves Á, Torregrosa-Penalva G, Vicente C, et al. Multipactor discharges in parallel-plate dielectric-loaded waveguides including space-charge effects[J]. IEEE Transaction on Electron Devices, 2008, 55(9): 2505-2511. doi: 10.1109/TED.2008.927945 [8] Kate I, Mandell M, Jongeward G, et a1. The importance of accurate secondary electron yields in modeling spacecraft charging[J]. Journal of Geophysical Research, 1986, 91(12): 13739-13744. [9] 董烨, 董志伟, 杨温渊. 介质单边二次电子倍增的理论分析与数值模拟[J]. 强激光与粒子束, 2011, 23(7):1917-1924. (Dong Ye, Dong Zhiwei, Yang Wenyuan. Theoretic analysis and numerical simulation of dielectric single-surface multipactor discharge[J]. High Power Laser and Particle Beams, 2011, 23(7): 1917-1924 [10] Song Baipeng, Shen Wenwei, Mu Haibo, et al. Measurements of secondary electron emission from dielectric window materials[J]. IEEE Transaction on Plasma Science, 2013, 41(8): 2117-2122. doi: 10.1109/TPS.2013.2265498 -
下载:
点击查看大图
图(6)
计量
- 文章访问数: 1154
- HTML全文浏览量: 563
- PDF下载量: 40
- 被引次数: 0
