Progress of grazing incidence X-ray micro-imaging diagnosis technology
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摘要: 高精密的X射线成像诊断是深入理解内爆过程，揭示点火尺度下未知物理问题的关键。基于掠入射反射的X射线显微镜，结合亚纳米级的超光滑球面或非球面反射镜，能够实现空间分辨优于5 μm的高分辨成像。介绍了国际惯性约束聚变领域的X射线显微成像技术发展及应用，重点展示了我国在高分辨X射线（KB）显微镜、多通道X射线KB显微镜以及大视场X射线KBA显微镜方向的进展，分析了下一阶段超高分辨X射线显微成像的研究计划。通过不断的技术创新，我国的X射线显微成像诊断能力已经达到国际先进水平。Abstract: High-precision X-ray imaging diagnosis is the key to understanding the implosion process and revealing unknown physical problems at the ignition scale. X-ray microscope based on grazing incidence reflection, combined with sub-nanometer ultra-smooth spherical or aspherical mirror, can achieve high-resolution imaging with spatial resolution better than 5 μm. This paper introduces the development and application of foreign X-ray microscopic imaging technology in the field of ICF research, highlights the progress of China’s high-resolution X-ray Kirkpatrick-Baez (KB) microscope, multi-channel X-ray KB microscope and large-field X-ray KBA microscope. The research plan for the next stage of ultra-high resolution X-ray microscopic imaging is analyzed. Through continuous technological innovation, China's X-ray microscopic imaging diagnostic capabilities have reached the internationally advanced level.
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图 3 用于NIF装置的四通道KB显微镜结构设计图[33]
Figure 3. Structural design drawing of four-channel KB microscope deployed in NIF
图 4 四通道KB显微镜对Ni网格的成像标定实验结果[34]
Figure 4. Experimental results of imaging calibration of Ni grid with four-channel KB microscope
图 5 （a）16通道KB显微镜采用的异形反射镜；（b）铜网背光成像结果；（c）DT冷冻靶内爆热斑的时间演化图像[38]
Figure 5. （a）The special-shaped mirror used in the 16-channel KB microscope；（b）Example framed images obtained with KBFRAMED of a backlit Cu grid；（c）KBFRAMED images of hot-spot X-ray emission from a cryogenic target implosion.
图 6 应用于Z-pinch装置的Wolter显微镜物镜实物图[41]
Figure 6. Picture of Wolter microscope objective applied to Z-pinch device
图 7 NIF研制的Wolter显微成像系统光路图[42]
Figure 7. Optical path diagram of Wolter micro-imaging system developed by NIF
图 8 多通道超环面镜X射线显微镜及网格背光成像结果[26]
Figure 8. Multi-channel toroidal mirror X-ray microscope GXI-1 and grid backlight imaging results
图 10 Ir膜、W/B4C周期多层膜以及非周期多层膜的反射率曲线示意图
Figure 10. Reflectance curves of Ir single-layer film，W/B4C periodic multilayer film and non-periodic multilayer film
图 11 不同薄膜类型的X射线显微成像异同
Figure 11. Difference of X-ray imaging with single layer，period multilayer and non-period multilayer films
图 12 用于系统装调的双周期多层膜示意图
Figure 12. Schematic diagram of double-period multilayer film used for system assembly
图 13 （a）双目瞄准节和（b）KB显微镜的耦合示意图[46]
Figure 13. （a）Schematic of the optical binocular system（OBS）and（b） its connection with the KB module
图 14 （a）网格电镜标定结果；（b）网格背光成像实验结果；（c）分辨率标定结果
Figure 14. （a）SEM calibration results of four-quadrant grid；（b）Backlight imaging experiment results of four-quadrant grid；（c）Resolution calibration results
图 15 高分辨X射线KB显微镜在我国强激光装置上的应用
Figure 15. Diagnostic experiments of X-ray KB microscope at Shenguang laser facility
图 16 时空分辨四通道KB显微镜结构图[47]
Figure 16. Optical structure for the time-gated four-channel KB microscope
图 17 基于“扫描针孔＋Si-PIN谱探测器”的X射线显微镜标定方法[48]
Figure 17. X-ray microscope intensity calibration method based on “scanning pinhole＋Si-PIN spectrum detector”
图 18 （a）四通道KB显微镜示意图；（b）神光II装置4.75 keV能点下四象限Cu网格成像[49]；（c）双扰动振幅CH调制靶分幅成像实验
Figure 18. （a）Schematic of four-channel KB microscope；（b）4.75 keV four-channel KB imaging results of four-quadrant Cu grids at Shenguang II laser facility；（c）Diagnostic experiment of double turbulent amplitudes
图 19 四通道KB显微镜中心视场分辨率
Figure 19. Center field of view resolution of four-channel KB microscope
图 20 四通道KB显微镜热斑测量结果
Figure 20. Results of hot-spot measurement with four-channel KB microscope
图 21 八通道KB显微镜的光学结构与网格背光成像结果[50]
Figure 21. Optical structure of eight-channel KB microscope and grid backlight imaging results
图 22 神光Ⅲ装置开展的两台KB显微镜的协同诊断[46]
Figure 22. Experimental configuration for collaborative X-ray imaging diagnostics at Shenguang III laser facility
图 24 2.5 keV与4.3 keV金网格靶内爆静态成像实验[16]
Figure 24. Static image of gold mesh target at 2.5 keV and 4.3 keV in implosion experiments
图 25 STTS构型非球面KBA显微镜光路图
Figure 25. Optical path diagram of STTS configuration aspherical KBA microscope
图 26 超高分辨KB显微镜光学性能仿真
Figure 26. Simulation of optical performance of ultra-high resolution KB microscope
表 1 不同膜系的KB显微镜性能比较
Table 1. Comparison of KB microscope performance with different films
grazing angle/（˚） field of view/µm resolution/µm reflectivity/% image field uniformity energy resolution ir single layer 0.425 160 6 60 high non W/B4C periodic multilayer 1.133 200 4 50 low ～30 W/B4C non-periodic multilayer 1.133 350 5 10 high ＜10 
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