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靶丸壳层厚度及其分布的白光反射光谱测量技术

樊婷 马小军 王宗伟 王琦 何智兵 易勇

樊婷, 马小军, 王宗伟, 等. 靶丸壳层厚度及其分布的白光反射光谱测量技术[J]. 强激光与粒子束, 2021, 33: 092002. doi: 10.11884/HPLPB202133.210179
引用本文: 樊婷, 马小军, 王宗伟, 等. 靶丸壳层厚度及其分布的白光反射光谱测量技术[J]. 强激光与粒子束, 2021, 33: 092002. doi: 10.11884/HPLPB202133.210179
Fan Ting, Ma Xiaojun, Wang Zongwei, et al. White light spectroscopy technology for measuring the uniformity of capsule shell thickness[J]. High Power Laser and Particle Beams, 2021, 33: 092002. doi: 10.11884/HPLPB202133.210179
Citation: Fan Ting, Ma Xiaojun, Wang Zongwei, et al. White light spectroscopy technology for measuring the uniformity of capsule shell thickness[J]. High Power Laser and Particle Beams, 2021, 33: 092002. doi: 10.11884/HPLPB202133.210179

靶丸壳层厚度及其分布的白光反射光谱测量技术

doi: 10.11884/HPLPB202133.210179
基金项目: 科学挑战专题项目(TZ2018006)
详细信息
    作者简介:

    樊婷:樊 婷,fanlixil@163.com

    通讯作者:

    马小军,maxj802@163.com

  • 中图分类号: TL632+.1

White light spectroscopy technology for measuring the uniformity of capsule shell thickness

  • 摘要: 为了精密检测靶丸壳层厚度及其分布数据,开展了靶丸壳层厚度及其分布的白光反射光谱测量技术研究。介绍了靶丸壳层的白光反射光谱及其光谱数据处理方法(极值法、峰值拟合法、干涉级次校正法等)的基本原理,搭建了基于白光反射光谱的精密回转轴系测量装置;开展了GDP靶丸壳层厚度及其分布的白光反射光谱测量、数据处理和可靠性验证实验,获得了靶丸壳层厚度圆周分布曲线。结果表明,基于峰值拟合法和干涉级次校正的白光反射光谱技术可实现靶丸壳层厚度及其分布的准确测量,其测量误差小于0.1 μm。
  • 图  1  圆周回转测量装置示意图

    Figure  1.  Schematic diagram of the circular rotation measuring device

    图  2  靶丸壳层白光反射光谱及局部波段内高斯拟合曲线

    Figure  2.  White light reflectance spectrum of target shell and Gaussian fitting curve in the local wavelength

    图  3  GDP靶丸的圆周厚度测量数据

    Figure  3.  Circumferential thickness measurement data of GDP target

    图  4  GDP薄膜的白光垂直扫描干涉测量曲线(图中数据应为6182.2nm)

    Figure  4.  White light vertical scanning interferometry curve of GDP film

    表  1  靶丸壳层厚度测量数据

    Table  1.   Thickness measurement data of target shell

    peak wavelength/nmphysical thickness d/nm
    extremum methodpeak value fittinggrade correction method
    646.37609.97525.27560.1
    663.97620.37526.67558.7
    682.47594.57528.07557.0
    702.17498.77529.37555.9
    723.27358.87530.77557.6
    746.17513.27531.97563.9
    770.07566.47533.27565.6
    下载: 导出CSV

    表  2  GDP膜厚测量数据

    Table  2.   Thickness measurement data of GDP film

    wavelength/nmoptical thickness/nmphysical thickness/nm
    586.919 661.26132.7
    604.819 658.46131.8
    623.519 642.16126.7
    644.119 645.86127.8
    665.619 636.96125.0
    689.019 638.76125.6
    713.719 628.36122.4
    下载: 导出CSV
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出版历程
  • 收稿日期:  2021-05-12
  • 修回日期:  2021-09-02
  • 网络出版日期:  2021-09-14
  • 刊出日期:  2021-09-24

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