Abstract:
Several micro-machinings were used to manufacture 0.22 THz folded waveguide slow wave structure. In with these micro-machinings, micro-milling was most suitable for manufacturing 0.22 THz folded waveguide slow wave structure now. And the loss of WR4 waveguide manufactured by micro-milling was tested. The relative conductivity of 3.2107 S/m was obtained when electromagnetic wave of 0.22 THz propagated in oxygen-free copper waveguide. Finally, a 0.22 THz folded waveguide TWT was developed and experimented with output power greater than 100 mW and 3 dB bandwidth of 3.5 GHz.